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SUMMARY:3D Monolithically Stacked CMOS Active Pixel Sensor Detectors for P
 article Tracking Applications.
DTSTART;VALUE=DATE-TIME:20120503T160000Z
DTEND;VALUE=DATE-TIME:20120503T163000Z
DTSTAMP;VALUE=DATE-TIME:20130519T235131Z
UID:indico-contribution-14@cern.ch
DESCRIPTION:Speakers: Dr. PASSERI\, Daniele (University of Perugia)\nTypic
 al tracking systems for particle trajectory reconstruction in High Energy 
 Physics experiments are based on different separated sensing layers\, feat
 uring pixels and/or strips sensitive elements.\n\nIn this work we propose 
 an innovative approach to particle tracking based on CMOS Active Pixel Sen
 sors layers\, monolithically integrated in a all-in-one chip featuring mul
 tiple\, stacked\, fully functional detector layers capable to provide mome
 ntum measurement (particle impact point and direction) within a single det
 ector. This will results in a very low material detector\, thus dramatical
 ly reducing multiple scattering issues.\n\nTo this purpose\, we rely on th
 e capabilities of the CMOS vertical scale integration (3D IC) technology. 
 The chip prototype has been fabricated within a multi-project run using a 
 130nm CMOS Chartered/Tezzaron technology [1]\, featuring two layers bonded
  face-to-face (Fig. 1). Several test structures have been integrated\, nam
 ely single pixels\, as well as small matrices\, e.g. featuring 5x5 and 16x
 16 pixels. Each pixel is 10x10 micrometers\, with different sensitive elem
 ent (photodiode) dimensions.\n\nTests have been carried out both on single
  sided (single tier) detectors (2D) and on full 3D structures\, providing 
 the functionalities of both tiers. To this purpose\, laser scans have been
  carried out using highly focussed spot size (below two micrometers at 780
 nm and 531nm wavelengths)\, obtaining coincidence responses of the two lay
 ers (Fig. 2). Tests have been made as well with X-ray sources an on the el
 ectrons/positrons Beam Test Facilities at the INFN LNF Frascati (Rome)\, I
 taly.\n\n[1] 3DIC Consortium http://3dic.fnal.gov/\n\nhttp://indico.cern.c
 h/contributionDisplay.py?contribId=14&sessionId=1&confId=154525
LOCATION:INFN Pisa
URL:http://indico.cern.ch/contributionDisplay.py?contribId=14&sessionId=1&
 confId=154525
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