Feb 21 – 25, 2022
Vienna University of Technology
Europe/Vienna timezone

Development of radiation-hard depleted CMOS timing sensors

Not scheduled
Vienna University of Technology

Vienna University of Technology

Gusshausstraße 27-29, 1040 Wien
Recorded Presentation Semiconductor Detectors


Yavuz Degerli (Université Paris-Saclay (FR)) Yavuz Degerli (CEA Saclay)


Developing a tens of picosecond sensor which will survive the radiation environment of the future high physics experiments is a challenge. For position detection, sensors in the HV-CMOS 150 nm process technology have proven to be inherently rad-hard thanks to the full depletion of several hundred microns of the substrate. A first iteration of a timing sensor in this technology, named CACTUS, has been tested with encouraging results but with a time resolution far from the 60 ps expected from the simulations due to unforeseen capacitance. A new prototype called MiniCACTUS has been designed and submitted to fabrication in order to address this issue. It includes integrated front-end electronics with discrimination for each pixel, a programmable slow-control, internal DACs and bias circuits. The baseline pixel pitches are 1 mm² and 0.5 mm² with additional test structures sizing 50 µm x 50 µm and 50 µm x 150 µm. The prototypes received from the foundry have been thinned to 100 µm and 200 µm and were post processed for backside polarization. The 200 µm samples have shown a breakdown voltage higher than 300 V, a S/N better than 50 with cosmic rays, and a timing resolution around 80 ps, limited by the resolution of our timing reference system. A test-beam campaign is foreseen at CERN this year in order to assess precisely the timing resolution of the sensor. All these results will be presented at the conference.

Primary authors

Fabrice Guilloux (CEA/IRFU,Centre d'etude de Saclay Gif-sur-Yvette (FR)) Yavuz Degerli (CEA - Centre d'Etudes de Saclay (FR)) Jean-Pierre Meyer (IRFU-CEA - Centre d'Etudes de Saclay (CEA)) Philippe Schwemling (CEA/IRFU,Centre d'etude de Saclay Gif-sur-Yvette (FR)) Tomasz Hemperek (University of Bonn (DE))

Presentation materials