Jun 25 – 29, 2023
Ole-Johan Dahls Hus
Europe/Oslo timezone

P2.59: Simulation of Energy-Dispersive X-ray Spectroscopy Systems

Jun 28, 2023, 5:43 PM
Ole-Johan Spiseri (Ole-Johan Dahls Hus)

Ole-Johan Spiseri

Ole-Johan Dahls Hus

Ole Johan Dahls Hus - Oslo Science Park Gaustadalléen 23B, 0373 Oslo


Thijs Withaar (Sioux Technologies)


Energy Dispersive X-ray Spectroscopy (EDS) is a common technique in electron microscopy to identify the chemical composition of samples. The standard method for analyzing the measurement data is semi-empirical, where the necessary correction factors have been determined decades ago using detectors much less sensitive than current ones.
This work shows that the Geant4[1] and AllPix2[2] open-source simulation tools can be used to accurately model the full EDS system. This is a first step towards a complete first-principles determination of the elemental composition from measured data, precluding the need for independently determined correction factors.
The simulations are compared to Scanning Electron Microscopy (SEM) measurements for validation and differences between simulation and measurements are highlighted.

Primary authors

Mr Abe Willems (Technical University Eindhoven) Mr Sebbe Blokhuizen (Stockholm University) Dr Aron Beekman (Sioux Technologies) Thijs Withaar (Sioux Technologies)

Presentation materials