Sep 7 – 12, 2014
University of Surrey
GB timezone
Arrival information and the latest Conference Programme can be downloaded using the link at the bottom of the home page

3D Monolithically Stacked CMOS Active Pixel Sensors for Particle Position and Direction Measurements

Sep 11, 2014, 8:30 AM
AP1&2 (University of Surrey)


University of Surrey

Guildford, UK
Oral Paper Advances in Pixel Detectors and Integration Technologies Session 11: Pixel Detectors and Integration Technologies


Dr Daniele PASSERI (University and INFN Perugia)


Particle tracking systems for trajectory reconstruction in High Energy Physics experiments are usually based on different separated sensing layers, featuring pixels and/or strips elements. In this work we propose a 3D monolithically stacked, multi-layer detectors based on CMOS Active Pixel Sensors (APS) layers which allows at the same time accurate estimation of the impact point and of the incidence angle an ionizing particle. The whole system features two fully-functional CMOS APS matrix detectors, including both sensing area and control/signal elaboration circuitry, stacked in a monolithic device by means of Through Silicon Via (TSV) connections thanks to the capabilities of the CMOS vertical scale integration (3D-IC) 130nm Chartered/Tezzaron technology. In particular, we present the results of the characterization of different chip prototypes, that have been extensively tested in laboratory using a variety of ionizing radiation sources (laser, X-rays). However, in order to evaluate the suitability of the two layer monolithic active pixel sensor system to reconstruct particle tracks, tests with proton beams have been carried out at the INFN LABEC laboratories in Florence (Italy). Particle direction and angle measurements have been carried out by parallel reading of the corresponding outer and inner pixel matrices fostering particle momentum evaluation within a single, multiple layers, 3D vertically stacked APS CMOS detector. It should be noticed as well that this approach could significantly reduce the problems of the material budget and multiple scattering of tracking systems, since the top layer has been thinned down to about ten micrometres, and the distance between the two layers is of the same order of magnitude. ![Fig. 1: The test set-up at INFN LABEC Labs. Florence (Italy).][1] ![Fig. 2: Coordinate residual measurements as a function of the particle incidence angle.][2] [1]: [2]:

Primary author

Dr Daniele PASSERI (University and INFN Perugia)


Arianna MOROZZI (University of Perugia) Daniel Magalotti (Universita e INFN (IT)) Keida KANXHERI (University and INFN Perugia) Ledian PIPERKU (University of Perugia) Dr Leonello Servoli (Universita e INFN (IT))

Presentation materials