Training on semiconductor devices, design and manufacturing

1 Jul 2013, 08:00 → 2 Jul 2013, 19:15 Europe/Zurich

Katane Palace Hotel, Catania (Italy)

The main purposes of the training are:

• to get an introduction to the techniques and fabrication processes for manufacturing semiconductors; the course will be designed for researchers without specific engineering backgrounds;
• to explore how a semiconductor manufacturing company produces devices on microchips and how the technologies to make devices evolve over time;
• to learn about the various steps in making semiconductor integrated devices and circuits (ICs).

The short course, organized by STMicroelectronics (IMS R&D Department), will take place on 1st and 2nd of July 2013 at the Katane Palace Hotel, Catania, Italy. It will be addressed to all the ESRs and ERs hired in the frame of FP7-Marie Curie PicoSEC ITN. Supervisors and other students invited by the partners of the project will be more than welcome.

Book of Abstracts Book of Abstracts

Monday 1 July

08:15 → 08:45 Registration

08:45 → 09:00 Welcome and Introduction to the Course

Speaker: Dr Massimo Mazzillo (STMicroelectronics)

09:00 → 14:00 Semiconductor Manufacturing Processes

Convener: Dr Giuseppe Arena (STMicroelectronic)

09:00 Brief Introduction of STMicroelectronics and Microelectronics Historical Notes

Speaker: Dr Giuseppe Arena (STMicroelectronics)

Slides 1_ARENA_INTRODUCTION_ST_PRESENTATION_and_GENERAL.pdf

09:30 Semiconductors Processing and Devices Fabrication - 1st part (crystal growth and epitaxy, thermal oxidation, ion implantation and diffusion)

Speaker: Dr Giuseppe Arena (STMicroelectronics)

Slides 2_ARENA_EPI_THERM_OX_ION_IMPL_DIFF.pdf

10:40 Coffee break

11:00 Semiconductors Processing and Devices Fabrication – 2nd part (Thin film deposition, photolithography, plasma basics, etching and new trends in microelectronics industry)

Speaker: Dr Giuseppe Arena (ST Microelectronics)

Slides

• 3_ARENA_PLASMA_THIN_FILMS_CVD_PVD.pdf
• 4_ARENA_LITHO_ETCH_CMP.pdf
• 5_ARENA_TRENDS_and_FINAL_REMARKS.pdf

12:45 Lunch break

14:00 → 16:50 Electrical Testing, Assembly and TCAD Simulations.

Conveners: Dr Cristina Miccoli (ST), Dr Federico Ziglioli (STMicroelectronics), Dr Stefano Sannella (ST)

14:00 Electrical Parametric Testing

Speaker: Dr Stefano Sannella (ST)

Slides Parametric_Test.pdf

14:50 Electronic Devices Packaging

Speaker: Dr Federico Ziglioli (STMicroelectronics)

Slides Electronic_Devices_Packaging.pdf Electronic_Devices_Packaging.pptx

15:40 TCAD Process and Device Simulations

Speaker: Dr Cristina Miccoli (STMicroelectronics)

Slides Introduction_TCAD_simulation_FINAL_Miccoli.pdf

16:30 Coffee break

16:50 → 18:30 Technology Development and Applications

Conveners: Dr Giuseppina Valvo (STMicroelectronics), Dr Sergei Dolinsky (GE Global Research Center)

16:50 STMicroelectronics Silicon Photomultiplier Technology

Speaker: Dr Giuseppina Valvo (ST Microelectronics)

Slides 2013-07-01_ST_SiPM_technology_Valvo.pdf 2013-07-01_ST_SiPM_technology_Valvo.pptx

17:40 Time-of-Flight PET Detector Development with SiPMs

Speaker: Dr Sergei Dolinsky (GE Global Research Center)

Slides Time-of-Flight_PET_Detector_development_with_SiPM.pdf Time-of-Flight_PET_Detector_development_with_SiPM.pptx

18:30 → 20:30 Social dinner

Tuesday 2 July

08:15 → 14:30 Visit to STMicroelectronics M5 8” Clean Room Facilities

The participants will be divided in two groups.
Members of IMS R&D Sensors Design Group will be available to answer to technical questions during the waiting period.

Convener: Dr Giovanni Vitale (ST Microelectronics)

08:15 First Group Visit (19 Participants)

10:45 Second Group Visit (19 Participants)

13:15 Lunch break

14:30 → 18:50 Surface Analysis and Solids Characterization

Conveners: Dr Domenico Mello (ST Microelectronics), Dr L. Renna (ST Microelectronics)

14:30 X-Ray Photoelectron Spectroscopy (XPS) and Secondary Ion Mass Spectrometry (SIMS)

Speaker: Dr Lucio Renna (ST Microelectronics)

Slides SIMS_-XPS_020713_luc.pdf

15:30 Optical Microscopy, Fault Detection and Isolation Techniques

Speaker: Dr Domenico Mello (ST Microelectronics)

Slides 00_-_Outline.pdf 01_-Failure_analysis.pdf

16:30 Coffee break

16:50 Samples Preparation and Transmission Electron Microscopy (TEM)

Speaker: Dr Domenico Mello (ST Microelectronics)

Slides 02-TEM.pdf 03_-TEM_sample_prep.pdf

17:50 Focused Ion Beam (FIB) and Scanning Electron Microscopy (SEM)

Speaker: Dr Domenico Mello (ST)

Slides

• 04_-_SEM.pdf
• 05-_Focused_Ion_Beam.pdf
• 06_-_Lamella.pdf

18:50 → 19:00 Conclusions and Debriefing