3D Sensors and MicroFabricated Systems

Sep 3, 2013, 1:50 PM
Dahlia (B2F) (International Conference Center Hiroshima)

Dahlia (B2F)

International Conference Center Hiroshima

1-5 Nakajima-cho Naka-ku, Hiroshima Japan
ORAL Pixels (including CCD's) - Charged particle tracking Session 4


Cinzia Da Via (University of Manchester (GB))


Micro-systems, based on MEMS technology, have been used in miniaturized low power and low mass smart structres in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for High-Luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper will report on the state of this development.

Primary author

Cinzia Da Via (University of Manchester (GB))

Presentation materials