13-19 June 2015
University of Alberta
America/Edmonton timezone
Welcome to the 2015 CAP Congress! / Bienvenue au congrès de l'ACP 2015!

Performance Assessment of a Silicon-Based Piezoresistive MEMS Strain Sensor

17 Jun 2015, 14:30
15m
CCIS L1-047 (University of Alberta)

CCIS L1-047

University of Alberta

Oral (Non-Student) / orale (non-étudiant) Instrumentation and Measurement Physics / Physique des instruments et mesures (DIMP-DPIM) W2-9 General Instrumentation and Measurement Physics (DIMP) / Physique générale des instruments et mesures (DPIM)

Speaker

Mr Ronald Delos Reyes (University of Alberta, Department of Chemical and Materials Engineering)

Description

The performance of a silicon-based MEMS strain sensor was assessed using static and dynamic strain. Static strain response of the sensor was tested under static bending and uniaxial loading conditions. Dynamic strain response was evaluated at frequencies of 10 Hz, 63 Hz, and 175 Hz using an aluminum cantilever beam mounted on an electrodynamic shaker. The static strain response showed that the sensor has a gauge factor of 13.0 and sensor sensitivity of 65 μV/με at 3.0 V-excitation. The dynamic strain response included some electrical noise in the sensor output signal. Comparison with a reference resistive foil gauge shows that the foil gauge and MEMS sensor have comparable dynamic response at the frequencies tested. Extended vibration testing demonstrated sensor lifetime of 2.7 million cycles at an equivalent strain of 1291.0 με

Primary author

Mr Ronald Delos Reyes (University of Alberta, Department of Chemical and Materials Engineering)

Co-authors

Prof. Kenneth Cadien (University of Alberta, Department of Chemical and Materials Engineering) Prof. Michael Lipsett (University of Alberta, Departement of Mechanical Engineering)

Presentation Materials

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