Superconducting quantum computer is manufactured based on semiconductor process which makes Qubits integration possible. At the same time, this kind of Qubit keeps high performance on ﬁdelity, de-coherence time, scalability and requires programmable (arbitrary waveform generator) AWG. In this paper, the AWG is implemented with 2 GSPS sampling rate and 16 bit vertical resolution and integrated with separate microwave devices onto a metal plate for scale-up consideration. A special waveform sequence output controller is designed to realize seamless waveform switching and arbitrary waveform generator. The jitter among multiple AWG channels is around 10 ps, INL/DNL is about 2 LSB, and tested Qubit performance of de-coherence time (T2∗) achieved 33% promotion over commercial 1 GSPS, 14 bit AWG.