Speaker
Description
The paper presents the results of experimental studies of the formation of high-intensity low ion energy pulsed beams of gases, gases and metals.The generation of gas plasma was conducted by a source based on non-self-sustained arc discharge with the hot cathode. In the case of mixed ion beams of gas and metal, the plasma formation was carried out by the source with the hot cathode and vacuum arc generator. A hybrid system of the ion beams formation combines the characteristics of the traditional grided ion extractors and plasma-immersion method of ion extraction with the subsequent ballistic focusing of accelerated ions. The space charge neutralization of the focused ion beam is carried out both through the injection of plasma in the equipotential drift space in the pauses between the bias pulses, and ionization of the working gas by ion beams. The peculiarities of the formation of ion beams of nitrogen, argon, hydrogen, and hybrid ion beams of nitrogen and titanium are demonstrated. The influence of the radius and the cell size of the grid electrode, repetition rate, duration and amplitude of bias pulses and plasma parameters on the formation of high-intensity, low ion energy beams is investigated. The possibility of the ion beam formation with current density up to 1 A/cm$^{2}$ at negative bias amplitude up to 3.2 kV is shown. The presented results demonstrate the possibility of high-speed deep alloying of AISI 5140 steel by high-intensity beam of nitrogen ions.
