# 17th International Conference on Ion Sources

15-20 October 2017
CERN
Europe/Zurich timezone

## Low Energy, High-Intensity Repetitively Pulsed Ion Beams Generation

16 Oct 2017, 16:30
2h 30m
CERN

#### CERN

Centre international de Conférence Genève (CICG). http://www.cicg.ch/
Poster presentation Production of high intensity ion beams

### Speaker

Mr Denis Sivin (National Research Tomsk Polytechnic University)

### Description

The paper presents the results of experimental studies of the formation of high-intensity low ion energy pulsed beams of gases, gases and metals.The generation of gas plasma was conducted by a source based on non-self-sustained arc discharge with the hot cathode. In the case of mixed ion beams of gas and metal, the plasma formation was carried out by the source with the hot cathode and vacuum arc generator. A hybrid system of the ion beams formation combines the characteristics of the traditional grided ion extractors and plasma-immersion method of ion extraction with the subsequent ballistic focusing of accelerated ions. The space charge neutralization of the focused ion beam is carried out both through the injection of plasma in the equipotential drift space in the pauses between the bias pulses, and ionization of the working gas by ion beams. The peculiarities of the formation of ion beams of nitrogen, argon, hydrogen, and hybrid ion beams of nitrogen and titanium are demonstrated. The influence of the radius and the cell size of the grid electrode, repetition rate, duration and amplitude of bias pulses and plasma parameters on the formation of high-intensity, low ion energy beams is investigated. The possibility of the ion beam formation with current density up to 1 A/cm$^{2}$ at negative bias amplitude up to 3.2 kV is shown. The presented results demonstrate the possibility of high-speed deep alloying of AISI 5140 steel by high-intensity beam of nitrogen ions.

### Primary author

Mr Denis Sivin (National Research Tomsk Polytechnic University)

### Co-authors

Prof. Alexander Ryabchikov (National Research Tomsk Polytechnic University) Mr Ilya Lopatin (Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences) Mr Alexey Shevelev (National Research Tomsk Polytechnic University) Ms Olga Korneva (National Research Tomsk Polytechnic University)

### Presentation materials

There are no materials yet.