Conveners
6.1 Nonequilibrium Plasma Applications I
- Guodong Meng (Xi'an Jiaotong University)
Conversion of methane (CH4) to value-added chemicals and fuels by non-thermal plasmas is a solution for effective energy utilization in the 21st century. In this paper, CH4 conversion by a nanosecond repetitively pulsed (NRP) discharge is studied. Negative NRP discharge can realize various discharge regimes, namely corona discharge, filamentary discharge and spark discharge, in a needle-plate...
Various non-equilibrium atmospheric pressure plasma generation methods are used for industrial applications such as corona discharge and dielectric barrier discharge (DBD). A DBD is developed for surface treatment of particulate materials using a rotatable electrode at low frequency high-voltage power source. The rotatable electrode dielectric barrier discharge reactor (RE-DBDR) is consisted...
We present the results of non-equilibrium plasma enhanced Chemical Looping (CL) reduction/oxidation steps with water splitting oxidation step and CH4+CO2 reforming step, respectively. Syngas and C2 hydrocarbons are produced during the reduction step and hydrogen is yielded during the oxidation step. Combinations of nano-catalyst and Oxygen Carrier (OC) materials such as Ni-based perovskite...
Recent studies have shown ultrafine particulate matter (UFPM) produced by a variety of sources represents a serious health hazard and has been associated with various forms of cancer. In this study, we demonstrate a highly effective method for treating restaurant smoke emissions using a transient pulsed plasma reactor based on a nanosecond high voltage pulse generator and also explore the...
In plasma processing for semiconductor fabrication, patterns are transferred from the overlying mask (typically photoresist, PR) to underlying features, ideally replicating the mask pattern. Feature distortion (e.g., twisting, tilting and edge roughness) during plasma etching can result from charging, polymer deposition and pattern dependencies. With feature sizes now less than tens of nm,...
