# PSD12: The 12th International Conference on Position Sensitive Detectors

Sep 12 – 17, 2021
University of Birmingham
Europe/London timezone

## Characterization of planar and 3D pixel sensors for the inner tracker of the CMS experiment (in-person)

Sep 15, 2021, 9:00 AM
15m
in-person

#### in-person

talk Advances in Pixel Detectors and Integration Technologies

### Description

The Compact Muon Solenoid (CMS) experiment is expected to collect an integrated luminosity of 3000 or even 4000fb^-1 in the ultimate scenario during the High Luminosity phase of the Large Hadron Collider (HL-LHC). This scenario comes with a high number of collisions per bunch crossing, and in turn, a high level of radiation for the inner layer of the CMS tracker. The simulations estimate a 1-MeV neutron equivalent fluence, phi_eq, of 2.3\times 10^16 cm^-2 at a distance of 2.8 cm from the collision point (for the integrated luminosity of 3000 fb^-1). The inner tracker of the CMS detector is required to withstand this range of fluence and maintain its track-finding functionality.

Planner and 3D pixel sensors with an active thickness of 150 um and pixel sizes of 25 \times 100 um^2 or 50 \times 50 um^2 have been produced by Hamamatsu Photonics (HPK), Fondazione Bruno Kessler (FBK), and Microelectronic National Center(CNM). The sensors were bumped bonded to the RD53A readout chip prototype. The sensor-chip modules were irradiated with 23 MeV and 24 GeV protons to the fluence of up to 2.4 \times 10^16 cm^-2 the Karlsruhe Institute of Technology (KIT) and PS-IRRAD proton facility.

The modules were tested in the DESY II beam test facility. The hit efficiency and spatial resolution as a function of the incidence angle of pixel sensors were determined from these measurements. It has been shown that for the highest fluence, the planar modules still reach 99\% hit efficiency, required for the Phase-2 IT, at bias voltages below 800V. For 3D sensors, no significant change in efficiency was observed after irradiation. This talk presents the results for planar and 3D sensors before and after irradiation.

Your name Andrea García Alonso Ms IFCA Spanish agarciaa@cern.ch

### Primary authors

Andrea Garcia Alonso (Universidad de Cantabria and CSIC (ES)) Mohammadtaghi Hajheidari (Hamburg University (DE))