With Atomic Layer Deposition (ALD) MEMS technology, thin multilayers have been realised which emit, after the absorption of an energetic electron at the top side, a multiple of secondary electrons at the bottom (emitting) side. In order to avoid charge-up effects, one of the layers has the function to replenish electrons and is therefore a conductor. With ALD MgO, a transmission secondary electron yield (TSEY) of 5.5 has been reached, enabling the single-electron sensitive Timed Photon Counter TipC in which a stack of 8 tynodes is placed on top of the TimePix3 or TimePix4 chip.
The alignment of 8 tynodes in a stack is obtained by applying grooves at both sides of a tynode: a glass wire in the groove is sandwiched between adjacent tynodes, locking their mutual 3D position.
|Institute||Nikhef & TU Delft|
|Your name||Harry van der Graaf|