Discussion of TSV processing in 65 nm CMOS wafers

Europe/Zurich
    • 10:00 11:00
      AIDA2020 WP4 plans with TSV in RD53A wafers 1h
      Speakers: Fabian Huegging (University of Bonn), Fabian Huegging (University of Bonn (DE)), Thomas Fritzsch (Fraunhofer IZM), Valerio Re (Universita and INFN (IT))