Speaker
Samuel Sonderegger
Description
Cathodoluminescence (CL) has been around even before the advent of electron microscopy and is well known for its capability to detect crystallographic defects in compound semiconductors at the nanometer scale. At the same time, CL is also well known to be a sometimes difficult to use laboratory technology. During this presentation we will look into key aspects between a lab and a fab technology and present key milestones and challenges we met over the last years bringing the CL technology closer to the semiconductor fab by automating it for specific applications.
Author
Samuel Sonderegger
Co-author
Dr
Christian Monachon
(Attolight)
