Cr/Sc Multilayer Radiator for Parametric EUV Radiation in "Water-Window" Range

8 Sept 2015, 18:00
1h 30m
Poster 3. Parametric X- Radiation Poster Section

Speaker

Dr Sergey Uglov (Tomsk Polytechnic University)

Description

Recently, in [1] it was experimentally shown that a Mo/Si multilayer may be used for generation of quasimonochromatic radiation in the range of extreme ultraviolet. This report presents the results of similar experimental study using the multilayer radiator consisted of 100 Cr/Sc bi-layers placed on a 0.5 $\mu$m thick Si3N4 membrane. The multilayer was specially created for generation of the parametric radiation in the “water window” spectral range of generated photons. The results of test measurements of the angular distributions of the density of extreme ultraviolet radiation generated by 5.7 MeV electrons in a periodic structure of the multilayer are presented and discussed. The present research was supported by the Ministry of Education and Science, the state order No. 3761, and by the Russian Foundation for Basic Research, the project No. 14-02-01032. The french team was supported by the Agence Nationale pour la Recherche, project No. ANR-10-BLAN-0924. References [1] S.R. Uglov, V.V. Kaplin , L.G. Sukhikh, A.V.Vukolov. JETP Letters, Vol. 100, No. 8 (2014) 503.

Author

Dr Sergey Uglov (Tomsk Polytechnic University)

Co-authors

Dr Alexander Kubankin (NRU BelSU) Dr Evgueni Meltchakov (Laboratoire Charles Fabry, Institut d'Optique Graduate School 2 avenue Augustin Fresnel F-91127 Palaiseau, France) Dr Franck Delmotte (Laboratoire Charles Fabry, Institut d'Optique Graduate School 2 avenue Augustin Fresnel F-91127 Palaiseau, France) Dr Jean-Michel André (CNRS UMR 7614, Laboratoire de Chimie Physique - Matière et Rayonnement Sorbonne Universités, UPMC Paris 06 11 rue Pierre et Marie Curie, F-75231 Paris Cedex 05, France) Dr Karine Le Guen (CNRS UMR 7614, Laboratoire de Chimie Physique - Matière et Rayonnement Sorbonne Universités, UPMC Paris 06 11 rue Pierre et Marie Curie, F-75231 Paris Cedex 05, France) Dr Philippe Jonnard (CNRS UMR 7614, Laboratoire de Chimie Physique - Matière et Rayonnement Sorbonne Universités, UPMC Paris 06 11 rue Pierre et Marie Curie, F-75231 Paris Cedex 05, France) Dr Sébastien de Rossi (Laboratoire Charles Fabry, Institut d'Optique Graduate School 2 avenue Augustin Fresnel F-91127 Palaiseau, France) Dr Valery Kaplin (Tomsk Polytechnic University)

Presentation materials

There are no materials yet.