Wear in sliding components is caused by the formation of microcracks at near-surface regions due to stresses by external forces as well as residual stresses in the materials. In order to get an insight into sub-surface damage electron backscatter diffraction (EBSD) is an efficient tool for the investigation of grains size distributions and grain boundary densities. Nevertheless, due to the grain refinement and microstructural changes in the nanometer range, high-resolution tools are required to observe the near surface zone. In this work we present investigations of the microstructure of tribologically modified materials by means of transmission electron microscopy (TEM) and transmission Kikuchi diffraction (TKD) and compare the results with EBSD measurements.