2nd PACMAN workshop

Session

Metrology and alignment challenges

13 Jun 2016, 11:00

Debrecen

Conveners

Metrology and alignment challenges

• Hermann Schmickler (CERN)

76. The European Extremely Large Telescope

Bertrand Koehler (ESO)

13/06/2016, 11:00

Paper and Poster

The European Extremely Large Telescope (E-ELT) is a 39m diameter optical/infrared telescope to be located on Cerro Armazones about 25 km away from the current ESO VLT Observatory at Cerro Paranal, Chile. After initial conceptual studies and a formal approval of the Programme by ESO Council back in 2012, the actual start of construction was actually authorised in 2014 when the required funding...

78. The LUMINAR project

Dr Andrew Lewis (National Physical Laboratory)

13/06/2016, 11:30

In 2012 a consortium of parties interested in Large Volume Metrology was formed to submit a Potential Research Topic into the European Metrology Research Programme. The topic was subsequently selected for the second stage of the call process and a project consortium consisting of 5 National Metrology Institutes, 3 Universities and 3 unfunded industrial partners was formed to bid into the call....

106. Precision Motion Control and Metrology in Lithographic Scanners

Dr Wim Symens (ASML)

13/06/2016, 12:00

Lithographic steppers and scanners are highly complex machines used to manufacture integrated circuits (ICs). These devices use an optical system to form an image of a pattern on a quartz plate, called the reticle, onto a photosensitive layer on a substrate, called the wafer. The circular wafer can contain many ICs, typically 100 or more, and needs to be repositioned from exposure to exposure....