Conveners
Metrology and alignment challenges
- Hermann Schmickler (CERN)
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Bertrand Koehler (ESO)13/06/2016, 11:00Paper and Poster
The European Extremely Large Telescope (E-ELT) is a 39m diameter optical/infrared telescope to be located on Cerro Armazones about 25 km away from the current ESO VLT Observatory at Cerro Paranal, Chile. After initial conceptual studies and a formal approval of the Programme by ESO Council back in 2012, the actual start of construction was actually authorised in 2014 when the required funding...
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Dr Andrew Lewis (National Physical Laboratory)13/06/2016, 11:30
In 2012 a consortium of parties interested in Large Volume Metrology was formed to submit a Potential Research Topic into the European Metrology Research Programme. The topic was subsequently selected for the second stage of the call process and a project consortium consisting of 5 National Metrology Institutes, 3 Universities and 3 unfunded industrial partners was formed to bid into the call....
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Dr Wim Symens (ASML)13/06/2016, 12:00
Lithographic steppers and scanners are highly complex machines used to manufacture integrated circuits (ICs). These devices use an optical system to form an image of a pattern on a quartz plate, called the reticle, onto a photosensitive layer on a substrate, called the wafer. The circular wafer can contain many ICs, typically 100 or more, and needs to be repositioned from exposure to exposure....
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