Speaker
Paul Hiret
(Universitat Basel)
Description
The plasma sheath mechanisms are well-known in non-magnetised plasmas, but a model for a sheath in a tilted magnetic field does not exist. In this work, we present the development of a facility to study the sheath of RF plasmas in a tilted magnetic field. We aim at characterising the sheath by determining the potential, the electron and the ion temperatures and densities. To measure these parameters, a movable planar electrostatic probe will be combined with optical emission spectroscopy. In this contribution, first probe measurements in Ar discharges under 0.5T are discussed.
Primary authors
Paul Hiret
(Universitat Basel)
Mr
Roland Steiner
(University of Basel)
Rodrigo Antunes
(University of Basel)
Laurent Marot
(University of Basel)
Ivo Furno
(epfl)
Dr
Stefano Alberti
(Ecole Polytechnique Federale de Lausanne (EPFL), Swiss Plasma Center (SPC), Lausanne, Switzerland)
Dr
Frédéric Brochard
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Dr
Eric Faudot
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Ludovic de Poucques
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Dr
Stéphane Heuraux
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Dr
Nicolas Lemoine
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Mr
Anil Cherukulappurath Mana
(Institut Jean Lamour (IJL), Université de Lorraine, Vandœuvre-lès-Nancy, France)
Prof.
Ernst Meyer
(University of Basel)