Workshop on Atomic Layer Deposition of Thin Films for Detector Fabrication

Thursday 1 Dec 2022, 10:15 → 15:00 Europe/Helsinki

A114 (Exactum)

1 Characterisation studies of silicon detectors with ALD-grown alumina as field insulator

Speaker: Shudhashil Bharthuar (Helsinki Institute of Physics (FI))

ALD_workshop.pdf

2 CdTe as Radiation Detector

Speakers: Mihaela Bezak, Mihaela Bezak (LUT University, Finland)

3 ALD & related activities in chemistry department

Speaker: Prof. Mikko Ritala (University of Helsinki)

4 Discussion

5 Lunch

6 ALD reactor demonstration and lab visit