Radiation from Relativistic Electrons in Periodic Structures "RREPS-23" & Electron, Positron, Neutron and X-ray Scattering under External Influences "Meghri-23"

Investigation of sputtering processes using acoustoplasmic magnetrons

19 Sept 2023, 17:24

1m

Poster Radiation Processes and Material Science Poster session II

Speaker

Ruben Chilingaryan (Institute of Applied Problems of Physics (IAPP) NAS RA)

Description

The results of a study of deposition by a new type of magnetron developed by us - an acoustoplasmic low-frequency magnetron, are presented. The deposition of conductive and non-conductive materials is considered, and also polycrystalline and porous structures.