Speaker
Description
In 2004, I started to develop a new TOF-SIMS/SNMS apparatus aiming at individual particle analysis of aerosols such as PM2.5. Since collected aerosols are a mixture of particles with different origin and histories during drifting in air, bulk analysis like ICP-MS and GC-MS is limited to reveal the details of each particles. Traditionally, SEM-EDS or SEM-WDS was used for individual particle analysis. But such method has insufficient sensitivity and lateral resolution because of low emission probability of characteristic X-ray and scattering of electron beam in the solid, respectively.
Imaging SIMS was developed in early 1980s using Focused Ion Beam (FIB) coupled with QMS or Magnetic sector MS. For a long time, FIB-SIMS was known as “high-lateral resolution” SIMS, and its lateral resolution was around 100 nm. But FIB-SIMS has some problems for aerosol analysis. One is lack of sensitivity and simultaneous detection of many species (both elements and compounds).
I designed a TOF-SIMS/SNMS with high lateral resolution and simultaneous detection ability. First of all, the FIB was carefully designed for chopping the DC beam while maintain a small beam spot. And a TOF-MS was also designed aiming for both SIMS and SNMS by considering deep depth of field of input lens system. As a result, ultimate resolution of 40 nm and high transmission of TOF optics were realized.
The TOF-SIMS/SNMS apparatus was adopted to many kinds of small samples, aerosols, cells, steels, all-solid-state batteries. After the accident of 1F, I focused on resonance SNMS for precise isotope analysis and imaging. I and my colleagues are now challenging the analysis of small dusts collected in 1F and fuel debris in the future.
This work was supported by the following research funding:
JST Sentan-Keisoku (“Development of Advanced Measurement and Analysis Systems”)
Ministry of the Environment, “The Environment Research and Technology Development Fund”
JAEA Nuclear Energy S&T and Human Resource Development Project through concentrating wisdom Grant Number JPJA21P21465814.
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