Speaker
Prof.
Yasuo Arai
(High Energy Accelerator Research Organization (JP))
Description
Silicon-On-Insulator(SOI) technology was developed in semiconductor industry to realize high-performance and low-power devices, and now it is widely used in many companies. We have been collaborating with Lapis Semiconductor Co. Ltd. (former OKI Semiconductor) to apply this technology for radiation imaging sensor.
The SOI chip has a layer of integrated-circuit which is separated from the chip's substrate by a thin layer of oxide. By employing high-resistivity substrate, we can construct very fine radiation detectors which combine radiation sensors and electronics circuits in a chip.
To develop the SOI pixel technology was not so easy task, but to keep this kind of technology for long time is much more difficult task.
Therefore we have been performing Multi-Project Wafer (MPW) run service to the people in universities and laboratories of all over the world. By doing this, we can maintain some amount of volume to keep the process.
Details of the technology and recent results will be presented.
Author
Prof.
Yasuo Arai
(High Energy Accelerator Research Organization (JP))
