Speaker
Sabina Ronchin
Description
The increased luminosity at the HL-LHC has driven the need for higher radiation resistance in particle sensors, enhanced timing capabilities, and greater granularity in vertex detectors. FBK has advanced 3D detector technology, known for its strong radiation hardness (up to ~2×10¹⁶ neq/cm²), by introducing innovations like stepper-based lithography to improve pitch reduction and process yield. Additionally, a 3D trench-based design has been developed, achieving superior timing resolution (~10 ps) due to a uniform electric field. The poster will review these advancements and initial results from 3D-column and 3D-trench production batches under the AIDA Innova project.
Authors
Sabina Ronchin
Maurizio Boscardin
(FBK Trento)
Matteo Centis Vignali
(FBK)
Dr
Francesca Mattedi
(FBK)
Laura Parellada Monreal
(Fondazione Bruno Kessler)
Prof.
Gian Franco Dalla Betta
(Universita degli Studi di Trento and INFN (IT))
