29 February 2012 to 2 March 2012
Jozef Stefan Institute
Europe/Zurich timezone

Surface effects in double-sided silicon 3D sensors fabricated at FBK

29 Feb 2012, 17:35
25m
Main Lecture Hall (Jozef Stefan Institute)

Main Lecture Hall

Jozef Stefan Institute

Jamova 39, Ljubljana, Slovenia

Speaker

Prof. Gian-Franco Dalla Betta (INFN and University of Trento)

Description

Surface effects were found to significantly affect the electrical characteristics of double-sided 3D detectors fabricated at FBK. With reference to 3D test diodes, we have studied the layout dependence of some critical parameters such as leakage current, breakdown voltage and capacitance both experimentally and with the aid of TCAD simulations. Simulations are found to accurately reproduce the device characteristics, thus explaining the basic mechanisms governing the electrical behavior and providing useful hints for layout optimization.

Authors

Prof. Gian-Franco Dalla Betta (INFN and University of Trento) Dr Marco Povoli (University of Trento and INFN)

Co-authors

Dr Alvise Bagolini (FBK) Dr Elisa Vianello (FBK) Dr Francesca Mattedi (FBK) Gabriele Giacomini (Fondazione Bruno Kessler) Maurizio Boscardin (FBK Trento) Nicola Zorzi (Fondazione Bruno Kessler - FBK)

Presentation materials