Feb 15 – 19, 2016
Vienna University of Technology
Europe/Vienna timezone

Si-PIN radiation detectors with low leakage current, thin incident window and large active area for Nuclear Physics applications.

Not scheduled
15m
Vienna University of Technology

Vienna University of Technology

Gusshausstraße 27-29, 1040 Wien
Board: 50
Poster Semiconductor Detectors

Speaker

Dr Daniela Bassignana (D+T Microelectronica, IMB-CNM (CSIC))

Description

Silicon PIN-type radiation detectors with high resistive substrate were simulated, designed and fabricated for nuclear physics applications. The main design considerations of the Si PIN-type radiation detector were a low leakage current and thin incident window of the p+ and n+ layers. Two technologies have been used to fabricate thin and thick substrates (from 200 µm to 1mm). The first technology incorporates one extracting ring and a floating guard ring around the active area of the detector in order to obtain leakage current density values of the order of 2 nA/cm2·100µm at full depletion and at room temperature for devices with an active area with hexagonal shape and large about 9 cm2 . In the second technology three floating guard electrodes and an edge protection structure were incorporated to increase the breakdown voltage (>1000V) and to minimize the leakage current density to values lower than 2 nA/cm2·100µm for devices with active area of the order of 4 cm2. Shallow p+ and n+ layers and thin metal/passivation layers were also incorporated to minimize particles/ions energy loss. The doping profile of the p+ and n+ layers were measured by means of SIMS technique and the detectors have been electrically characterized. Experimental results will be presented and discussed.

Primary author

Dr Daniela Bassignana (D+T Microelectronica, IMB-CNM (CSIC))

Co-authors

Dr David Quirion (Centro Nacional de Microelectrónica IMB-CNM (CSIC)) Dr Giulio Pellegrini (Centro Nacional de Microelectrónica (IMB-CNM-CSIC) (ES)) Manuel Lozano Fantoba (Centro Nacional de Microelectrónica IMB-CNM (CSIC))

Presentation materials