17–22 Jun 2018
Europe/Zurich timezone
15th European Vacuum Conference

Ion pump design to minimize particle emissions

19 Jun 2018, 14:40
20m
Room 4 (CICG)

Room 4

CICG

Contributed Vacuum Science & Technology Vacuum Science & Technology

Speaker

Mauro Audi (Agilent Technologies Vacuum Division )

Description

Ion pumps are widely used in very sensitive applications such as Particle Accelerators and Electron Microscopes , where particles emitted from the vacuum pumps can heavily affect the performance of the machine or the resolution of the instrument .
Neutral and charged particle emission from ion pumps has been analyzed and its dependance on pressure, operating voltage and element geometry is discussed .
Optical shields are a common solution to limit particle emission , but the resulting conductance limitation is usually a major concern for the performance of the pump itself .
A specific ion pump element designed to minimize the particle emission while maintaining a high fraction of the original puming speed is described

Author

Mauro Audi (Agilent Technologies Vacuum Division )

Co-authors

Paolo Manassero (Agilent Technologies Vacuum Division) Chiara Paolini (Agilent Technologies Vacuum Division)

Presentation materials

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