15th European Vacuum Conference (EVC-15)

Comparative Measurements of Ion Pump pumping speed according to ISO/DIS 3556 and DIN 28429

19 Jun 2018, 15:40

20m

Room 4 (CICG)

Contributed Vacuum Science & Technology Vacuum Science & Technology

Speaker

Stefan Meierott (VACOM Vakuum Komponenten & Messtechnik GmbH)

Description

Sputter Ion Pumps (SIP) offer an appealing strategy to efficiently maintain ultra-high and extremely-high vacuum conditions in a vacuum chamber. The pumping speed, i.e. the volume flow of gas extracted from the vacuum in a specific period of time, can be determined according to various standards. However, recorded pumping speeds may vary severely, depending on the standard chosen and the detailed procedure applied. This talk compares experimentally obtained pumping speeds of several SIPs, acquired according to the most commonly applied standards, DIN 28429:2014-05 and ISO/DIS 3556-1.2(1992).