17–22 Jun 2018
Europe/Zurich timezone
15th European Vacuum Conference

Diamond-like carbon film with excellent tribomechanical properties deposited by PACVD

20 Jun 2018, 16:50
1h 50m
Main Lobby (CICG)

Main Lobby

CICG

Poster Thin Film & Surface Engineering Poster Session Wednesday

Speaker

Mr Chao-Qian Guo (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, )

Description

Diamond-like carbon (DLC) films have been deposited on stainless steel wafers by plasma assisted chemical vapor deposition technique. Thickness and roughness of the film were measured by a surface profilometer. Microhardness, friction coefficient and profiles of wear tracks of DLC films were investigated by microhardness tester, ball on disk tribometer and surface profilometer, separately. Results showed that DLC film prepared by plasma assisted chemical vapor deposition displayed excellent tribological and mechanical properties. Roughness Ra of the film with a thickness of beyond 2 micrometers was about 56 nm. DLC film on stainless steel showed a high microhardness (Hv) which was more than 2000. Friction coefficient of DLC was lower than 0.25 when counterpart was a steel ball. Wear rate of the film which was calculated by Archard's classical wear equation after the measurements of wear tracks' cross sectional areas belonged to the order of magnitude of 10 to -8 cubic milliliters per Nm.

Author

Mr Chao-Qian Guo (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, )

Co-authors

Mr Song-Sheng Lin (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, ) Mrs Qian Shi (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, ) Mrs Chun-Bei Wei (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, ) Mr Hong Li (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, ) Yi-Fan Su (Guangdong Institute of New Materials. National Engineering Laboratory for Modern Materials Surface Engineering Technology & The Key Lab of Guangdong for Modern Surface Engineering Technology, )

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