Speaker
Description
With the aim of improving detection and analysis of Low-Energy and Secondary Electrons (LEEs and SEs of ≤100eV) in the Scanning Field-Emission Microscope (SFEM) tests are performed on a miniature electron detection unit employing a Bessel Box energy analyser. In electron microscopes, detection of LEEs is inherently difficult due to the presence of electrostatic (and magnetic) fields in proximity of the beam-target interaction region, inhibiting the escape of SEs and complicating the interpretation of their detected signal. The reduced dimensions of such a compact energy analyser (length of 1&1/2 channeltrons) consents its employment close to the sample surface, thus minimising the aforementioned fields effects. Experimental results demonstrating the capability of this analyser to collect electron spectra are discussed.
