Joint Annual Meeting of SPS and ÖPG 2019

【164】Towards the fabrication of ZnO-based quantum cascade lasers with double-metal waveguides

28 Aug 2019, 19:00

1h 30m

Lichthof

Poster Condensed Matter Physics (KOND) Poster Session

Speaker

Dr Hanh Hoang (Institute of Solid State Electronics, Technische Universität Wien, Vienna, Austria)

Description

Zinc oxide is a rather new material for optoelectronic applications. Due to its high LO phonon energy (ELO~72 meV), it is suitable for THz-devices like quantum cascade lasers (QCLs), which are currently limited to operation temperatures around ~200 K for typical GaAs material systems.
In this work, we show the development of a full fabrication process for double metal waveguides, processed into ZnO/ZnMgO QCL structures. This includes the development of a CH4-based RIE dry etching process with additional passivation for preventing surface leakage, a thermo-compression bonding (wafer bonding) with a substrate removal procedure and the fabrication of low-resistance ohmic contacts. In addition, we will present first photoluminescence measurements from such ZnO-based QC structure at liquid nitrogen temperatures and above.