Speaker
Description
Nowadays sensoric electronics importance is irrefutable, there is a constant demand to push forward limits in matters of detection limits, spatial resolution, among others. In applications that need sensing magnetic fields magnetoresistive (MR) sensors have attracted much interest in particular because of their high sensitivity, low power consumption, low cost and small size. Due to the typical sizes of the elements involved, tens of microns down to a few nanometers, strict micro/nanometric control is essential in all of the fabrication processes. As deviations in the process can compromise critically the behavior of the final device, either electrically (e.g. Resistance Area product, $R \times A$) or magnetically (e.g. saturation magnetization, $M_{Sat}$). Metrology is then critical for process validation and control for process evolving
