Defect Spectroscopy on Proton Irradiated 4H Silicon Carbide Devices

29 Nov 2023, 09:40
20m
6/2-024 - BE Auditorium Meyrin (CERN)

6/2-024 - BE Auditorium Meyrin

CERN

114
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SiC

Speaker

Niels Sorgenfrei (Albert Ludwigs Universitaet Freiburg (DE))

Description

New radiation hard materials are investigated for future high energy particle physics experiments. Silicon carbide is one of the materials currently considered, due to it's interesting properties, e.g. a larger bandgap and a higher breakdown field compared to silicon. The larger bandgap leads to low leakage currents even after high fluences of irradiation, allowing for non-cooled operation.
This study focuses on investigating intrinsic and radiation-induced defects in n-type 4H-SiC devices by subjecting them to 23$\,$GeV protons at various fluences. The sensors studied were manufactured by IMB-CNM, with a 5$\,$µm or 50$\,$µm thick epitaxial layer on top of a 350$\,$µm thick 4H-SiC substrate. The samples were irradiated at IRRAD to 1E+11, 1E+12, 1E+13, 1E+14 and 1E+15$\,$p/cm$^2$. TSC and DLTS measurements were performed in the temperature range of 20$\,$K to 350$\,$K. The presented results include IV and CV measurements taken before and after irradiation, as well as the defect parameters obtained from TSC and DLTS measurements.

Author

Niels Sorgenfrei (Albert Ludwigs Universitaet Freiburg (DE))

Co-authors

Presentation materials