Speaker
Description
LGAD sensors have recently captured the attention of the HEP detector community due to several advantages such as high temporal resolution and excellent radiation hardness. One of the objectives of the new DRD3 collaboration is to demonstrate the production capabilities of LGAD sensors on a larger scale for upcoming Tracking/Time-of-Flight applications. The ability to manufacture a full-scale detector based on LGADs is contingent upon both the microelectronics industry's availability to support medium-volume productions and the reliability of the manufacturing technology, which must meet stringent requirements in terms of reproducibility and uniformity of key sensor characteristics.
In this context, FBK has recently initiated a technology transfer of the FBK-LGAD technology to an external CMOS foundry capable of handling larger productions at reduced costs. The production of the first learning batch, aimed at demonstrating the feasibility of running the FBK process in an external CMOS foundry, was completed in May 2024. The design for evaluating the technology transfer corresponds to the one envisaged for the CMS-ETL detector (16x16 pixels with a total area of approximately 2x2 cm$^2$). The batch included some process splits of the Gain Layer dose, while carbon co-implantation was included on all wafers. Subsequent to production, the wafers have been characterized at the automatic probe stations at FBK under dark conditions and IR illumination.
The first characterization outcomes revealed highly promising results in terms of electrical properties of the sensor: Breakdown Voltage, Depletion Voltage, and Gain align with expectations and the results obtained at the FBK internal facility. Additionally, critical aspects such as uniformity and reproducibility of Gain and Breakdown Voltage were assessed. The positive results, along with the exceptional production yield, are very promising for the future of large-scale LGAD production.
| Type of presentation (in-person/online) | in-person presentation |
|---|---|
| Type of presentation (scientific results or project proposal) | Presentation on scientific results |
