Vitaliy Fadeyev (University of California,Santa Cruz (US))
Within the framework of RD50 and ATLAS PPS collaborations, we are pursuing scribe-cleave-passivate (SCP) technology of making “slim edge” sensors. Such sensors have only a minimal amount of inactive peripheral region, which benefits construction of large-area tracker and imaging systems. Key application steps of this method are surface scribing, cleaving, and passivation of the resulting sidewall. We are working on developing both the technology and understanding of the processed devices performance. Our recent advances with regard to the processing steps and device performance will be described. We will also report on the status of devices processed at the request of the RD50 collaborators.