Speaker
Sabina Ronchin
(FBK)
Description
A new hybrid structure of a 3D silicon sensor coupled to a scintillator for the detection of fast and thermal neutrons is presented. The device is based on a PIN diode with DRIE-etched cavities filled with polysiloxane acting as a scintillator, while the signal is transferred to the other side by means of TSV. The structure increases the active interaction volume for neutron, with respect to a planar device, giving higher detection efficiencies. We present the fabrication process and some selected results from the electrical characterization of devices and test structures.
Author
Sabina Ronchin
(FBK)
Co-authors
Alberto Quaranta
(Università di Trento)
Gabriele Giacomini
(Fondazione Bruno Kessler)
Prof.
Gian-Franco Dalla Betta
(INFN and University of Trento)
Giorgio Ciaghi
(Università di Trento)
Marco Povoli
(University of Trento (Italy))
Maurizio Boscardin
(FBK Trento)
Nicola Zorzi
(Fondazione Bruno Kessler - FBK)
