Speaker
Dr
Maurizio Boscardin
(FBK)
Description
We report on the results from the production of the 3D silicon pixel sensors for the ATLAS IBL.
We present the fabrication process and some selected results from the electrical characterization of detectors and test structures.
The main technological aspects related to the production yield optimization will also be addressed.
Author
Maurizio Boscardin
(FBK)
Co-authors
Alvise Bagolini
(FBK)
FRANCESCA MATTEDI
(FBK)
Gabriele Giacomini
(FBK)
Gian-Franco Dalla Betta
(Università di Trento)
Marco Povoli
(Università di Trento)
Dr
Maurizio Boscardin
(FBK)
Nicola Zorzi
(FBK)
