3D Sensors and MicroFabricated Systems

3 Sept 2013, 13:50
30m
Dahlia (B2F) (International Conference Center Hiroshima)

Dahlia (B2F)

International Conference Center Hiroshima

1-5 Nakajima-cho Naka-ku, Hiroshima Japan
ORAL Pixels (including CCD's) - Charged particle tracking Session 4

Speaker

Cinzia Da Via (University of Manchester (GB))

Description

Micro-systems, based on MEMS technology, have been used in miniaturized low power and low mass smart structres in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for High-Luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper will report on the state of this development.

Author

Cinzia Da Via (University of Manchester (GB))

Presentation materials