Speaker
Cinzia Da Via
(University of Manchester (GB))
Description
Micro-systems, based on MEMS technology, have been used in miniaturized low power and low mass smart structres in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for High-Luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling.
This paper will report on the state of this development.
Author
Cinzia Da Via
(University of Manchester (GB))