Speaker
Dr
Kevin Lauer
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Description
In the past, the CiS Forschungsinstitut für Mikrosensorik und Photovoltaik has made a mark as a manufacturer of reliable radiation hard planar silicon sensors for various important high energy particle detectors.
Radiation detectors based on 3D structures in silicon are a promising way to increase their radiation hardness. This is especially needed in the high luminosity upgrades of the large hadron collidier (LHC) at CERN. Due to the small distances between the electrodes in 3D sensors the depletion voltage can be clearly reduced and the charge collection efficiency is increased.
A first concept for realisation of a 3D radiation detector at CiS will be presented and discussed. The required holes can be implemented using a deep reactive ion etching capability of a newly installed ICP etching tool. A challenging task is the conformal doping of the trenches. Several approaches are discussed.
Author
Dr
Kevin Lauer
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Co-authors
Dr
Alexander Lawerenz
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Erik Hiller
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Dr
Li Long
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Ralf Roeder
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Stefan Völlmeke
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
Dr
Tobias Wittig
(CIS Institut fuer Mikrosensorik und Photovoltaik GmbH (DE))
