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Results of experiments on the electron acceleration and X-ray generation in during operation of the piezoelectric transformer in vacuum are described here. Piezoelectric transformer operates at the resonance frequency. Electrons are accelerated from the high voltage electrode of the piezoelectric ceramic transformer to the grounded target, which leads to generation of the characteristic and bremsstrahlung x-ray. The returning of the charge to the high-voltage electrode is provided due to electrons emitted from a filament installed near the target. We found that the X-ray yield increases linearly at increasing of the pressure of the residual gas in the chamber within two orders of magnitude up to about ten mTorr, when the gas discharge around of the piezoelectric transformer arises. Possible applications of the piezoelectric transformer for production x-ray in the miniature accelerators are discussed. In this work, the last results of the measurements x-ray spectra are presented.
