Speaker
Description
In this contribution, we will present our latest LGAD developments. We have completed the fabrication of two LGAD runs and another two are currently being fabricated. The 1st run, AIDA2020 v2, has already been presented at the 35th RD50 workshop, which is a repetition of the previous AIDA2020 run. We have since performed more measurements which show improved results, and these will be presented. The 2nd run is devoted to calibrating our 6-inch technology in 50 µm epitaxial wafers. In this run, pad diodes were fabricated with a variety of boron implantation doses, calibrated with the previous 6-inch runs. Preliminary results of the electrical characterization will be presented. The performance of this run is crucial to select the best technological parameters for the new ATLAS-CMS Common Run. We will base our technological parameters on the 6-inch runs in SOI and epitaxial wafers. Lastly, we are developing a new AC-LGAD run in 6-inch wafers.
