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24th Australian Institute of Physics Congress

11–16 Dec 2022
Australia/Adelaide timezone
Co-locating with the 7th International Workshop of Specialty Optical Fibres and Their Applications (WSOF), the Australian and New Zealand Conference on Optics and Photonics (ANZCOP), and the Conference on Optoelectronlc and Microelectronic Materials and Devices (COMMAD)

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The Application of Gallium Oxide High Power Optical Devices by Etching Process Optimization

12 Dec 2022, 11:45
15m
Room R7 (Adelaide Convention Centre)

Room R7

Adelaide Convention Centre
Talk (preferred) COMMAD: Nano/micro-fabrication and processing Conference on Optoelectronic and Microelectronic Materials and Devices

Speaker

Ms Xiting Zhou

Description

β-Ga2O3 gratings were fabricated by inductively-coupled-plasma (ICP) etching process to have a clearer understanding of dry etching mechanism during semiconductor device manufacturing process. Different parameters were adjusted to investigate their effects and find the best etching recipe.

Author

Ms Xiting Zhou

Co-authors

Prof. David Lewis Mr Yong Cheow Lim Prof. Yan Jiao Prof. Nelson Tansu Dr Philip van Eyk Dr Petar Atanackovic

Presentation materials

1145 Mon RB7 Zhou.pdf
Abstract_XITING.docx
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