Author in the following contributions
- Integrated deflection measurement for electrostatically actuated MEMS
- MEMS based silicon-air-silicon long wave infrared spectrometer
- Towards long-wave infrared narrowband tunable FPIs
- MBE growth and mechanical properties of HgCdSe infrared materials
- Fabrication challenges towards realization of MEMS-enabled spectrally tunable metasurface filter for long-wavelength infrared
- Spectrally tunable metasurface filters for long-wavelength infrared range
