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24th Australian Institute of Physics Congress

11–16 Dec 2022
Australia/Adelaide timezone
Co-locating with the 7th International Workshop of Specialty Optical Fibres and Their Applications (WSOF), the Australian and New Zealand Conference on Optics and Photonics (ANZCOP), and the Conference on Optoelectronlc and Microelectronic Materials and Devices (COMMAD)

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Integrated deflection measurement for electrostatically actuated MEMS

13 Dec 2022, 17:30
1h 30m
Exhibition Halls F & G (Adelaide Convention Centre)

Exhibition Halls F & G

Adelaide Convention Centre
Poster COMMAD: Semiconductor materials, devices, and technologies Poster session

Speaker

Michal Zawierta (The University of Western Australia)

Description

Modern surface micromachined optical MEMS commonly use electrostatic means to achieve mechanical actuation and often require a closed feedback loop to maximize tuning accuracy. Our method enables MEMS membrane displacement measurement without device modifications.

Author

Michal Zawierta (The University of Western Australia)

Co-authors

Adrian Keating Dhirendra Kumar Tripathi (The University of Western Australia) Dilusha Silva (The University of Western Australia) Gino Putrino Hemendra Kala (The University of Western Australia) Lorenzo Faraone (The University of Western Australia) Mariusz Martyniuk

Presentation materials

MichalZawierta_COMMAD2022_Abstract.pdf
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