11–16 Dec 2022
Australia/Adelaide timezone
Co-locating with the 7th International Workshop of Specialty Optical Fibres and Their Applications (WSOF), the Australian and New Zealand Conference on Optics and Photonics (ANZCOP), and the Conference on Optoelectronlc and Microelectronic Materials and Devices (COMMAD)

Single and multilayer metal contacts for chemically and thermally robust interconnects to porous silicon-based sensors

15 Dec 2022, 17:30
1h 30m
Exhibition Halls F & G (Adelaide Convention Centre)

Exhibition Halls F & G

Adelaide Convention Centre

Poster COMMAD: Semiconductor materials, devices, and technologies Poster session

Speaker

Dr Pritam Sharma

Description

The choice of metal contacts on the surface of porous silicon films for fabricating opto-electronic devices is affected by post-metal deposition processing steps. In the present work, Al, Cr/Au, Ti, and Ti/Pt/Au metallisation schemes were investigated for fabricating such devices.

Primary author

Co-authors

Prof. Gia Parish (University of Western Australia) Prof. John Dell (University of Western Australia) Prof. Adrian Keating (University of Western Australia)

Presentation materials