Yasuo Arai
(High Energy Accelerator Research Organization (KEK))
05/09/2007, 09:00
Oral
We are evaluating SOI (Silicon-On-Insulator) technology for radiation-hard electronics and monolithic radiation sensor applications. The process we used is a 0.15um CMOS, fully-depleted SOI technology developed by OKI Electronics Industry Co. Ltd.
This SOI device has two Si layers; one is a thick substrate (handle wafer) which is Czochralski high-resistivity silicon, and another is SOI layer...