Speaker
Description
The High Luminosity upgrade of the CERN Large Hadron Collider (HL-LHC) calls for new high-radiation tolerant silicon pixel sensors, capable of withstanding, in the innermost tracker layer, fluences up to 2.3E16 neq/cm2 (1MeV equivalent neutrons). An extensive R&D program aiming at 3D pixel sensors, built with a top-side only process, has been put in place in CMS in collaboration with FBK (Trento, Italy) and CNM (Barcelona, Spain) foundries. A number of sensors were interconnected with the CROC readout chip; CROC is the prototype, in 65nm technology, of the pixel readout chip which will be used in the HL-LHC inner trackers. The modules have been tested on beam at CERN and DESY, before and after irradiation up to an equivalent fluence of about 1.5E16 neq/cm2. Analysis of collected data shows great performance, with hit detection efficiencies around 98% measured after irradiation.