30 May 2012 to 1 June 2012
Bari
Europe/Zurich timezone

Progress on Scribe-Cleave-Passivate (SCP) Slim Edge Technology

31 May 2012, 17:40
20m
Bari

Bari

New structures and 3D sensors Full Detector Systems

Speaker

Vitaliy Fadeyev (University of California,Santa Cruz (US))

Description

Within the framework of RD50 collaboration, we are pursuing scribe-cleave-passivate (SCP) technology of making “slim edge” sensors. Such sensors have only a minimal amount of inactive peripheral region, which benefits construction of large-area tracker and imaging systems. Key application steps of this method are surface scribing, cleaving, and passivation of the resulting sidewall. We are working on developing both the technology and physical understanding of the processed devices performance. Our recent advances include: a) further investigation of scribing technologies, b) new methods of sidewall passivation, c) investigation automated processing machines for scribing and cleaving, d) investigation of the charge collection near the edge, e) radiation hardness of the processed devices. We will also report on the status of devices processed at the request of the RD50 collaborators.

Authors

Dr Bernard Phlips (NRL) Mr Colin Parker (UCSC) Hartmut Sadrozinski (SCIPP, UC santa Cruz) Dr Marc Christophersen (NRL) Mr Scott Ely (UCSC) Vitaliy Fadeyev (University of California,Santa Cruz (US))

Presentation materials