Feb 17 – 19, 2015
FBK, Trento
Europe/Zurich timezone

Development of a new technology for the next generation of 3D Pixel Sensors for HL-LHC within the INFN (ATLAS-CMS) R&D program in collaboration with FBK.

Feb 19, 2015, 9:25 AM
"Stringa" Conference Hall (FBK, Trento)

"Stringa" Conference Hall

FBK, Trento

Via Sommarive, 18 38123 Povo - Trento ITALY


Sabina Ronchin (Fondazione Bruno Kessler)


We report on the joint INFN ATLAS-CMS R&D program, in collaboration with FBK, aimed at the development of pixel sensors for the phase 2 upgrade of the LHC (HL-LHC). In this talk we describe the development of the main technological steps allowing for the fabrication of a new generation of Si 3D pixel detectors with small pixel and thin active thickness. In particular, we report on the results of the process tests carried out at FBK in order to optimize the etching by DRIE and the filling (at least partial) with poly-Si of narrow (5 micron) columnar electrodes.

Primary author

Sabina Ronchin (Fondazione Bruno Kessler)


Gabriele Giacomini (Fondazione Bruno Kessler) Prof. Gian-Franco Dalla Betta (INFN and University of Trento) Maurizio Boscardin (FBK Trento) Nicola Zorzi (Fondazione Bruno Kessler - FBK)

Presentation materials