Speaker
Dr
Andrew Blue
(Dept. Of Physics & Astronomy, University of Glasgow)
Description
With attractive features such as low power consumption, high dynamic
range and increased in-pixel functionality, Active Pixel Sensors
(APS) have begun to rival charge-coupled devices (CCD) for use as
imaging sensors. Recently work has been undertaken in order to
produce APS devices with enhanced performance and extended
wavelength sensitivity as an alternative to so-called science grade
CCD devices used in a variety of applications. Undertaken as part
of the MI-3 project, this work will show how modifications were made
to a Startracker chip – a 525x525 array of 25um square pixels - for
use in the imaging of UV signals. Using photolithographic and wet
etching techniques, windows were removed in the passivation layers
of each pixel, permitting the sensor to be sensitive to an extended
UV range. The selective opening of windows on the sensitive surface
maintains the integrity of the interconnect layers of the CMOS
process.
Improvements in spectral response measurement will be shown after
the introduction of the oxide windows and the performance of the
device pre and post processing discussed.
Primary author
Dr
Andrew Blue
(Dept. Of Physics & Astronomy, University of Glasgow)
