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Description
High-resolution Elastic Recoil Detection Analysis (HERDA), which consists of a magnet and a position sensitive detector, is one of the promising methods of quantitative analysis of hydrogen in material surface.
As the position sensitive detector for HERDA, Micro channel plates (MCP) are mainly used, however, the count rate (~1000 cps) and the noises of dark current of a MCP and stray ions in a chamber limits the measurement time (~several tens of minutes) and the detection limit (~10$^{21}$ atoms/cm$^{3}$). For improving the count rate and the signal to noise ratio to achieve higher sensitivity, the HERDA system using multi-channel Si based position sensitive detector has been developed. Also, as a low noise, parallel and fast readout circuit from the detector, a slew rate limited Time-over-Threshold (ToT) ASIC, which has 48 sets of a preamplifier and a slew rate limited shaping amplifier and a comparator, was designed and manufactured using 0.25 $\mu$m TSMC’s 2.5/3.3 V CMOS process. The result combined with a slew limited ToT ASIC and a multi-channel silicon strip particle detector will be reported.